The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2006

Filed:

Dec. 20, 2004
Applicants:

Stefan Jakschik, Dresden, DE;

Matthias Goldbach, Dresden, DE;

Thomas Mikolajick, Dresden, DE;

Thomas Hecht, Dresden, DE;

Inventors:

Stefan Jakschik, Dresden, DE;

Matthias Goldbach, Dresden, DE;

Thomas Mikolajick, Dresden, DE;

Thomas Hecht, Dresden, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

Charge-trapping regions are arranged beneath lower edges of the gate electrode separate from one another. Source/drain regions are formed in self-aligned manner with respect to the charge-trapping regions by means of a doping process at low energy in order to form shallow junctions laterally extending only a small distance beneath the charge-trapping regions. The self-alignment ensures a large number of program-erase cycles with high effectiveness and good data retention, because the locations of the injections of charge carriers of opposite signs are narrowly and exactly defined.


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