The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Dec. 24, 2003
Joseph J. Consolini, Costa Mesa, CA (US);
Keith Frank Best, Prunedale, CA (US);
Alexander Friz, San Jose, CA (US);
Joseph J. Consolini, Costa Mesa, CA (US);
Keith Frank Best, Prunedale, CA (US);
Alexander Friz, San Jose, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
In a method of measurement according to one embodiment of the invention, a relative position of a temporary alignment mark on one side of a substrate and an alignment mark on the other side of the substrate is determined, and the temporary alignment mark is removed. Before removal of the temporary alignment mark, a relative position of that mark and another mark on the same side of the substrate may be determined. The temporary alignment mark may be formed in, e.g., an oxide layer.