The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Mar. 19, 2004
Applicants:
Kyoichi Mori, Kanagawa, JP;
Fujio Yamasaki, Kanagawa, JP;
Toshinori Sugiyama, Kanagawa, JP;
Inventors:
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 33/12 (2006.01); G05G 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An XY stage includes a movable frame having a rectangular space inside thereof and movable on a reference base along one of X and Y axes, a first drive source provided in the reference base for moving the movable frame, a rectangular movable base mounted in the rectangular space of the movable frame, which is movable on the reference base along the other of the X and Y axes and stopped on the reference base, and a second drive source provided in the movable frame, for moving the movable base.