The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Sep. 24, 2004
Balasubramanian Ramachandran, Santa Clara, CA (US);
Joseph Michael Ranish, San Jose, CA (US);
Ravi Jallepally, Santa Clara, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Raman Achutharaman, San Jose, CA (US);
Brian Haas, San Jose, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Balasubramanian Ramachandran, Santa Clara, CA (US);
Joseph Michael Ranish, San Jose, CA (US);
Ravi Jallepally, Santa Clara, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Raman Achutharaman, San Jose, CA (US);
Brian Haas, San Jose, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Method and apparatus for obtaining a tailored heat transfer profile in a chamber housing a microprocessor manufacturing process, including estimating heat transfer properties of the chamber; estimating heat absorptive properties of a wafer; adjusting the physical characteristics of the chamber to correct the heat transfer properties; and utilizing the chamber for manufacturing microprocessors.