The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Oct. 09, 2003
Applicants:
Thomas Schenkel, San Francisco, CA (US);
Ivo W. Rangelow, Baunatal, DE;
Jan Meijer, Bochum, DE;
Inventors:
Assignee:
The Regents of the University of California, Oakland, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/26 (2006.01); H01J 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device and a method for positionally accurate implantation of individual particles in a substrate surface () are described. A diaphragm for a particle beam to be directed onto the substrate surface () and a detector provided thereon in the form of a p-n junction for determining a secondary electron flow produced upon impact of a particle onto the substrate surface () are provided on a tip () which is formed on a free end portion of a flexible arm () to be mounted on one side. The device is part of a scanning device operating according to the AFM method.