The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2006
Filed:
Jun. 15, 2001
Kiyotaka Wasa, Nara, JP;
Akira Unno, Kanagawa, JP;
Tetsuro Fukui, Kanagawa, JP;
Takanori Matsuda, Tokyo, JP;
Kiyotaka Wasa, Nara, JP;
Akira Unno, Kanagawa, JP;
Tetsuro Fukui, Kanagawa, JP;
Takanori Matsuda, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Kiyotaka Wasa, Nara, JP;
Abstract
A method of manufacturing a piezoelectric element structure having a supporting substrate and a piezoelectric film supported on the supporting substrate. A first layer, and a second layer having zirconium, each provided with a perovskite structure, are formed in that order on the supporting substrate. The two layers are formed to be in contact with each other or laminated through an intermediate layer. The temperature is set to 500° C. or more at the time of formation of the layers, and cooling is subsequently provided from the formation temperature at least to 450° C. with a cooling speed of 30° C./min or more.