The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Mar. 30, 2004
Nicholas Kottenstette, Newburyport, MA (US);
Ali Shajii, Canton, MA (US);
Louis Slamka, Vancouver, WA (US);
Siddharth P. Nagarkatti, Acton, MA (US);
Nicholas Kottenstette, Newburyport, MA (US);
Ali Shajii, Canton, MA (US);
Louis Slamka, Vancouver, WA (US);
Siddharth P. Nagarkatti, Acton, MA (US);
MKS Instruments, Inc., Wilmington, DE (US);
Abstract
A flow monitoring system includes a first temperature-sensitive resistive device, thermally coupled to a first portion of a fluid transfer apparatus, for producing a first temperature-dependant voltage signal representative of the temperature of the fluid within the first portion of the fluid transfer apparatus. A first current control device, coupled to the first temperature-sensitive resistive device, controls a first current signal flowing through the first temperature-sensitive resistive device. A second temperature-sensitive resistive device, thermally coupled to a second portion of the fluid transfer apparatus, produces a second temperature-dependant voltage signal representative of the temperature of the fluid within the second portion of the fluid transfer apparatus. A second current control device, coupled to the second temperature-sensitive resistive device, controls a second current signal flowing through the second temperature-sensitive resistive device. A monitoring circuit monitors the first and second temperature-dependant voltage signals and produces an output signal representative of the volume of fluid passing through the fluid transfer apparatus.