The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Aug. 23, 2004
Bing Ji, Allentown, PA (US);
Stephen Andrew Motika, Kutztown, PA (US);
Dingjun Wu, Macungie, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
David Allen Roberts, Fogelsville, PA (US);
Bing Ji, Allentown, PA (US);
Stephen Andrew Motika, Kutztown, PA (US);
Dingjun Wu, Macungie, PA (US);
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
David Allen Roberts, Fogelsville, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
This invention relates to apparatus and a method to protect the internal components of semiconductor processing equipment such as a plasma reactor or a reactive species generator against physical and/or chemical damages during etching and/or cleaning processes. Layered superlattice materials having three or more metal elements such as strontium bismuth tantalate (SBT) are used to form a protective barrier on the surfaces of the internal components of a reaction chamber.