The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Jan. 13, 2004
Applicants:
Shaoher X Pan, San Jose, CA (US);
Xiao Yang, Sunnyvale, CA (US);
Dongmin Chen, Belmont, MA (US);
Shoucheng Zhang, Stanford, CA (US);
Inventors:
Shaoher X Pan, San Jose, CA (US);
Xiao Yang, Sunnyvale, CA (US);
Dongmin Chen, Belmont, MA (US);
Shoucheng Zhang, Stanford, CA (US);
Assignee:
Miradia Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.