The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Apr. 07, 2004
James Gregory Goodberlet, Melrose, MA (US);
Alphonse George Goodberlet, Blue Hill, ME (US);
James Gregory Goodberlet, Melrose, MA (US);
Alphonse George Goodberlet, Blue Hill, ME (US);
Other;
Abstract
This invention enables high-resolution, high-precision motion control at low cost. A novel flexure-beam motion-reducing actuator is incorporated into an XYØ positioning stage to enable rigidly stable positioning of any object with sub-10-nanometer linear-positioning precision and sub-0.1-microradian rotary-positioning precision. The actuator's output element moves in the same direction as its input element. A single actuator enhances the resolution and precision of any motion-control drive mechanism by a factor as much as 50 or more, and a cascaded pair of actuators provide enhancement factors greater than 1000. In one embodiment, the enhancement factor is adjustable manually. The actuator and stage are useful for optical, lithographic and scanning probe applications.