The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Aug. 02, 2004
Nozomi Takai, Tsuchiura, JP;
Masaaki Oguri, Tsuchiura, JP;
Nozomi Takai, Tsuchiura, JP;
Masaaki Oguri, Tsuchiura, JP;
Tokyo Semitsu Co., Ltd., Tokyo, JP;
Tosei Engineering Corp., Ibaraki, JP;
Abstract
In a measuring apparatus, a plurality of design values in design values substituted in the correction computation equations for correcting a geometrical measurement error inherent in the measuring apparatus are set as variables, the variables are optimized by a numerical solution to obtain optimized correction computation equations. A measured value is computed by using the optimized correction computation equations obtained. For optimization of the variables, a master work is measured and the variables are adjusted so that a measurement error is minimized.