The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Dec. 18, 2002
Thomas J. Sonderman, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Brian K. Cusson, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Brian K. Cusson, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.