The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Dec. 22, 2003
Gerrit Johannes Nijmeijer, Eindhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Christiaan Alexander Hoogendam, Veldhoven, NL;
Roeland Nicolaas Maria Vanneer, Eindhoven, NL;
Gerrit Johannes Nijmeijer, Eindhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Christiaan Alexander Hoogendam, Veldhoven, NL;
Roeland Nicolaas Maria Vanneer, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus according to an embodiment of the invention includes a measurement system configured to determine a position of a target portion of a substrate, using at least one among an optical sensing operation and an optical detecting operation. The position is determined via an optical path that includes at least one catoptrical system arranged to have an imaging function of at least one dioptrical element.