The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2006

Filed:

Nov. 09, 2004
Applicant:

Yao-hsin Feng, Hualien, TW;

Inventor:

Yao-Hsin Feng, Hualien, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/46 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of dicing a wafer is disclosed. A wafer with an active surface and a back surface is provided. Prior to dicing the wafer, a removable layer is formed on the back surface of the wafer. The removable layer is attached to a tape, such as a sawing tape. After the wafer is singulated and the adhesion of the removable layer is reduced or removed, the separate chips singulated from the wafer are easily removed from the tape. Because of the removable layer attached on the back surface of the wafer, the cutting stress caused by singulating the wafer will be transferred without concentrated at the back surface of the wafer so as to prevent the wafer from chipping and being warped.


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