The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Jan. 18, 2005
Soo-hwan Jeong, Gyeonggi-do, KR;
Wan-jun Park, Seoul, KR;
In-kyeong Yoo, Gyeonggi-do, KR;
Ju-hye Ko, Gyeonggi-do, KR;
Soo-hwan Jeong, Gyeonggi-do, KR;
Wan-jun Park, Seoul, KR;
In-kyeong Yoo, Gyeonggi-do, KR;
Ju-hye Ko, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
Provided are a method of growing carbon nanotubes and a carbon nanotube device. The method includes: depositing an aluminum layer on a substrate; forming an insulating layer over the substrate to cover the aluminum layer; patterning the insulating layer and the aluminum layer on the substrate to expose a side of the aluminum layer; forming a plurality of holes in the exposed side of the aluminum layer to a predetermined depth; depositing a catalyst metal layer on the bottoms of the holes; and growing the carbon nanotubes from the catalyst metal layer.