The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Oct. 28, 2004
James J. Xu, San Jose, CA (US);
Ken K. Lee, Los Altos, CA (US);
James J. Xu, San Jose, CA (US);
Ken K. Lee, Los Altos, CA (US);
CoreTech Optical, Inc., San Jose, CA (US);
Abstract
An inspection system includes a stage, a light source, and a light collection subsystem is disclosed. The stage supports an article for inspection, the article having a surface. The light source provides light impinging on and scattering from an illumination area of the surface. The light collection system includes a plurality of collectors arranged generally in a semi-spherical layout such that each collector collects at least a portion of the scattering light at a collection polar angle and a collection azimuthal angle that are unique relative to collection polar angle and collection azimuthal angle of other collectors. The collectors are arranged in three rings of collectors. The inspection system includes a plurality of channels where each collector of the light collection subsystem is associated with a channel. The inspection system includes a processor connected to the channels. The processor is adapted to process information from the channels.