The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Jun. 14, 2005
Eyal Ginsburg, Tel-Aviv, IL;
Li-peng Wang, San Jose, CA (US);
Alexander Talalyevsky, Jerusalem, IL;
Eyal Bar-sadeh, Jerusalem, IL;
Doron Rubin, Givataim, IL;
Eyal Ginsburg, Tel-Aviv, IL;
Li-Peng Wang, San Jose, CA (US);
Alexander Talalyevsky, Jerusalem, IL;
Eyal Bar-Sadeh, Jerusalem, IL;
Doron Rubin, Givataim, IL;
Intel Corporation, Santa Clara, CA (US);
Abstract
An apparatus and method to provide a tapered electrode in an acoustic resonator. A piezoelectric (PZ) layer, such as Aluminum Nitride (AlN), is formed over a bottom electrode having a tapered end. A top electrode is positioned on the PZ layer. The tapered end of the bottom electrode creates a mild topography to the under layer of the PZ material to prevent cracking in the PZ layer. The tapered end also decreases acoustic losses in the acoustic resonator because the PZ grains are highly oriented. In one embodiment, the acoustic resonator is a film bulk acoustic resonator (FBAR).