The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Aug. 11, 2004
Nikolai Eberhardt, Bethlehem, PA (US);
Jerome C. Licini, Macungie, PA (US);
Steven C. Murphy, Pottsville, PA (US);
William Zuidervliet, Allentown, PA (US);
Nikolai Eberhardt, Bethlehem, PA (US);
Jerome C. Licini, Macungie, PA (US);
Steven C. Murphy, Pottsville, PA (US);
William Zuidervliet, Allentown, PA (US);
Lehighton Electronics, Inc., Lehighton, PA (US);
Abstract
An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, waveguide, first, second and third detectors, and an eccentric bore mount for adjusting the sample. A circular waveguide, carrying the TEmode, terminates by the sample behind which a short is located. A magnetic field is applied perpendicular to the plane of the sample, and an incident TEwave causes an ordinary reflected wave and a reflected wave caused by the Hall effect. A first detector measures the ordinary reflected wave, which has the same polarization as the incident wave. A seperate probe measures the reflected wave caused by the Hall effect, whose polarization is perpendicular to the former. This reflected wave is detected, and the output combined with an attenuated; phase shifted, portion of the forward power at a single detector, to eliminate by destructive interference any spurious incident signal at said detector.