The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Oct. 23, 2003
Ulysses Gilchrist, Reading, MA (US);
Louise S. Barriss, North Reading, MA (US);
Hagen Raue, Göda, DE;
Berndt Lahne, Rothenstein, DE;
Manfred Heinze, Dresden, DE;
Joachim König, Bannewitz, DE;
Klaus Schultz, Jena, DE;
Ulysses Gilchrist, Reading, MA (US);
Louise S. Barriss, North Reading, MA (US);
Hagen Raue, Göda, DE;
Berndt Lahne, Rothenstein, DE;
Manfred Heinze, Dresden, DE;
Joachim König, Bannewitz, DE;
Klaus Schultz, Jena, DE;
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device () consists of a vertical drive mechanism () mounted on the wall element () and a sensor head () that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (), said sensor head being arranged so as to pivot on the vertical drive mechanism () in order to pivot into the opening (). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.