The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Oct. 26, 2004
Martin Kienle, Ellwangen, DE;
Helmut Muller, Schwabisch Gmund, DE;
Peter Hoffrogge, Oberkochen, DE;
Wilhelm Bolsinger, Dischingen, DE;
Martin Kienle, Ellwangen, DE;
Helmut Muller, Schwabisch Gmund, DE;
Peter Hoffrogge, Oberkochen, DE;
Wilhelm Bolsinger, Dischingen, DE;
Carl Zeiss NTS GmbH, Oberkochen, DE;
Abstract
A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam device makes it possible to align the surface of the object perpendicular to the beam axes of the particle beam columns, using simple means, in an accurate and error-free manner. The object slide assumes a basic position from which it may be tilted into the position in which the first or the second beam axis is perpendicular or at least almost perpendicular to the receiving surface of the object slide. In the basic position, a normal to the receiving surface of the object slide is spatially oriented such that an angle formed between the first beam axis and the normal is greater than or equal to an angle formed between the second beam axis and the normal.