The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Nov. 12, 2004
Paul Meneghini, Haverhill, MA (US);
Ali Shajii, Canton, MA (US);
Paul Meneghini, Haverhill, MA (US);
Ali Shajii, Canton, MA (US);
MKS Instruments, Inc., Wilmington, MA (US);
Abstract
A sensing apparatus for use in a mass flow rate sensor for measuring a fluid flow rate includes a main conduit for containing a fluid flow, and a sensor passageway for tapping a portion of the fluid flow from the main conduit at a first location, and returning the portion of the fluid flow to the conduit at a second location. At least one bypass passageway, which may be provided in the form of a tube, is positioned in the main conduit between the first and second locations, and the bypass passageway is provided with non-negligible entrance effects that are substantially equal to entrance effects of the sensor passageway, so that a bypass ratio of the apparatus remains constant. A mass flow rate sensor of the present disclosure accurately measures any type of gas but only requires calibration in only one reference gas.