The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Dec. 20, 2004
Jan Jaap Kuit, Veldhoven, NL;
Dirk Jan Bijvoet, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Hubert Marie Segers, 's-Hertogenbosch, NL;
Raimond Visser, Best, NL;
Johannes Maquine, Geldrop, NL;
Jan Jaap Kuit, Veldhoven, NL;
Dirk Jan Bijvoet, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Hubert Marie Segers, 's-Hertogenbosch, NL;
Raimond Visser, Best, NL;
Johannes Maquine, Geldrop, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention relates to a lithographic apparatus including a projection system configured to project a patterned radiation beam onto a target portion of a substrate held on a substrate support, the patterned beam of radiation being patterned with a patterning device held by a patterning device support. The lithographic apparatus includes an exchangeable object handling apparatus for exchanging an exchangeable object with a exchangeable object station and a support, the exchangeable object being one of the substrate and the patterning device and the support being one of the substrate support and the patterning device support, the exchangeable object handling apparatus including an intermediate holding device for holding an exchangeable object, which intermediate holding device can interact with the support to place an exchangeable object on or take an exchangeable object from the support, and a robot which can exchange an exchangeable object with the support, the intermediate holding device and said exchangeable object station.