The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Jan. 25, 2005
Haruhiko Yoshioka, Nirasaki, JP;
Haruhiko Yoshioka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A stage driving apparatus for a stage of this invention includes a horizontal driving mechanism which moves in a horizontal direction a stage to place a wafer thereon, and an elevating mechanism which moves the stage in a vertical direction. The elevating mechanism has a first elevating mechanism which supports the horizontal driving mechanism and vertically moves the horizontal driving mechanism, and a second elevating mechanism which supports the stage on the horizontal driving mechanism and vertically moves the stage over a short distance with a piezoelectric element.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile