The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Dec. 17, 2002
Boon June Yeap, Singapore, SG;
Jie Wei HU, Singapore, SG;
Rong Duan, Singapore, SG;
Ka Shing Kenny Kwan, Singapore, SG;
Boon June Yeap, Singapore, SG;
Jie Wei Hu, Singapore, SG;
Rong Duan, Singapore, SG;
Ka Shing Kenny Kwan, Singapore, SG;
ASM Technology Singapore PTE Ltd., Singapore, SG;
Abstract
An apparatus to prevent oxidation of an electronic device, such as a semiconductor substrate during a semiconductor packaging process, comprises a substantially-enclosed conduit having at least one movable support defining a path through which the electronic device may travel and a plurality of gas outlets to introduce a relatively inert gas into the conduit. Conveying means adapted to engage and move the electronic device along the conduit is provided, and an opening along a portion of the conduit allows engagement between the conveying means and the electronic device. Actuating means are adapted to shift the movable support whereby the size of the path is adjustable to suit different electronic devices.