The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2006

Filed:

Jan. 06, 2003
Applicants:

Jack C. Rife, Washington, DC (US);

Michael I. Bell, Rockville, MD (US);

James Horwitz, Fairfax, VA (US);

Milton N. Kabler, Alexandria, VA (US);

Inventors:

Jack C. Rife, Washington, DC (US);

Michael I. Bell, Rockville, MD (US);

James Horwitz, Fairfax, VA (US);

Milton N. Kabler, Alexandria, VA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01); F04B 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a transducer suitable for a fluidic drive for a miniature acoustic-fluidic pump or mixer that includes an acoustic transducer attached to an exterior or interior of a fluidic circuit or reservoir. The transducer converts radio frequency electrical energy into an ultrasonic acoustic wave in a fluid that in turn generates directed fluid motion through the effect of acoustic streaming. The method includes depositing a piezo-electric thin-film onto a platinum coated silicon wafer or substrate with capping electrodes, defining each separate transducer; and dicing said piezoelectric tin-film to provide individual transducers.


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