The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Jun. 29, 2004
Carolus Johannes Catharina Schoormans, Hoge Mierde, NL;
Johannes Mathias Theodorus Antonius Adriaens, Eindhoven, NL;
Carolus Johannes Catharina Schoormans, Hoge Mierde, NL;
Johannes Mathias Theodorus Antonius Adriaens, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of calibration according to one embodiment includes moving a table to a plurality of exposure positions. At each position, a first part of a measurement system measures a position of the table along each of two orthogonal axes in the plane, and a mark is exposed onto the substrate. For each mark, and for two different orientations of the substrate, a second part of the measurement system measures measurement positions of the table corresponding to the mark. Based on the measured positions, a characterization of a position measurement error of the measurement system along one of the orthogonal axes, as a function of position along both of the orthogonal axes, is obtained.