The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Feb. 03, 2004
Michael Jozef Mathijs Renkens, Sittard, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Ruben Jan Kok, 's Hertogenbosch, NL;
Martinus Cornells Maria Verhagen, Valkenswaard, NL;
Michael Jozef Mathijs Renkens, Sittard, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Ruben Jan Kok, 's Hertogenbosch, NL;
Martinus Cornells Maria Verhagen, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention pertains to a measurement system for measuring displacement of a moveable object relative to a base in at least a first direction of measurement, the moveable object having at least one reference part that is moveable in a plane of movement relative to the base, the actual movements of the reference part being within an area of said plane of movement that is bounded by a closed contour having a shape. The measurement system comprises a sensor head that operatively communicates with a planar element. The sensor head is mounted onto the base and the planar element being mounted onto the reference part of the moveable object or the other way around, wherein the planar element has a shape that is essentially identical to the shape of the closed contour.