The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2006

Filed:

Dec. 02, 2004
Applicants:

Naohiko Kimizuka, Kanagawa, JP;

Kiyotaka Imai, Kanagawa, JP;

Yuri Masuoka, Kanagawa, JP;

Inventors:

Naohiko Kimizuka, Kanagawa, JP;

Kiyotaka Imai, Kanagawa, JP;

Yuri Masuoka, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 27/108 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

In P-channel MOS transistor comprising a gate insulating film composed of a high dielectric constant material and the gate electrode composed of polycrystalline silicon, a technology for preventing Fermi level pinning and providing a stable reduction of the threshold voltage is provided. The MOS transistor functions as a buried channel transistor formed by implanting In as a P-type impurity into the channel region. In addition, the gate electrode is composed of the polycrystalline silicon film, which is doped with N-type impurity. Thus, the gate depletion caused by Fermi level pinning can be effectively inhibited. Therefore the depletion in the gate electrode can be avoided and the threshold voltage can be stably diminished. In this case, the threshold voltage is stably reduced since electric charge is induced by applying a constant voltage to the gate electrode.


Find Patent Forward Citations

Loading…