The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2006
Filed:
Feb. 09, 2005
Applicants:
Kazunori Ando, Chiba, JP;
Amiko Nihei, Chiba, JP;
Inventors:
Kazunori Ando, Chiba, JP;
Amiko Nihei, Chiba, JP;
Assignee:
SII NanoTechnology Inc., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scanning probe microscopy system has a cantilever having a probe at a distal end thereof and a heating unit for heating the sample. A moving unit effects relative movement between the cantilever probe and the sample to bring the cantilever probe into contact with a surface of the sample for measuring a property of the sample. A shielding unit shields between the cantilever probe and the sample during heating of the sample by the heating unit.