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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7097920 B1

PDFFull Text
Date of Patent:
Aug. 29, 2006

Filed:

Mar. 24, 2003

Group iii nitride based semiconductor substrate and process for manufacture thereof

Applicants:

Akira Usui, Tokyo, JP;

Masatomo Shibata, Tsuchiura, JP;

Yuichi Oshima, Tsuchiura, JP;

Inventors:

Akira Usui, Tokyo, JP;

Masatomo Shibata, Tsuchiura, JP;

Yuichi Oshima, Tsuchiura, JP;

Assignees:

NEC Corporation, , JP;

Hitachi Cable, Ltd., , JP;

Attorney:

Hayes Soloway P.C.

Primary Examiner:

Jennifer McNeil

Assistant Examiner:

Timothy M Speer

Int. Cl.
CPC ...
B32B 19/00 (2006.01); C30B 15/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

To provide a semiconductor substrate of a group III nitride with a little warp, this invention provides a process comprising such steps of:

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