The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2006
Filed:
Nov. 04, 2002
Bulent M. Basol, Manhattan Beach, CA (US);
Halit N. Yakupoglu, Corona, CA (US);
Cyprian E. Uzoh, San Jose, CA (US);
Homayoun Talieh, San Jose, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Halit N. Yakupoglu, Corona, CA (US);
Cyprian E. Uzoh, San Jose, CA (US);
Homayoun Talieh, San Jose, CA (US);
ASM Nutool, Inc., Phoenix, AZ (US);
Abstract
The present invention provides an apparatus for electrochemical mechanical processing of a surface of a workpiece by utilizing a process solution. The apparatus of the present invention includes an electrode touching the process solution, a belt workpiece surface influencing device extended between a supply spool and a receiving spool. During the process, the surface of the workpiece is placed in proximity of the workpiece surface influencing device and the process solution is flowed through the process section and onto the surface while a potential difference is applied between the electrode and the surface of the workpiece.