The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2006
Filed:
Mar. 27, 2003
Applicants:
Chih-chieh Yeh, Taipei, TW;
Yuh-hwa Chang, Shulin, TW;
Ching-heng Po, Miaoli, TW;
Hsin-chieh Huang, Chu Hsien, TW;
Jiann-tyng Tzeng, Shiang Ilan, TW;
Inventors:
Chih-Chieh Yeh, Taipei, TW;
Yuh-Hwa Chang, Shulin, TW;
Ching-Heng Po, Miaoli, TW;
Hsin-Chieh Huang, Chu Hsien, TW;
Jiann-Tyng Tzeng, Shiang Ilan, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02F 1/29 (2006.01);
U.S. Cl.
CPC ...
Abstract
A product comprising a micromirror comprising a reflective layer and a treatment layer overlying the reflective layer, and wherein the treatment layer comprises Ti.