The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2006
Filed:
Dec. 17, 2004
Applicant:
Shinobu Uno, Tokyo, JP;
Inventor:
Shinobu Uno, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/08 (2006.01); H01J 3/14 (2006.01); H01J 3/26 (2006.01); H01J 1/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus extracts line profiles from the probe profile of the charged-particle beam. Features indicative of the line profile, i.e., μ, σ, and ρ indicating left-and-right asymmetry, width, and unevenness around the center, respectively, are extracted. An aberration amount calculator calculates amounts of aberrations corresponding to aberrations, respectively, in the charged-particle beam from the amounts of features μ, σ, and ρ. An aberration corrector corrects the aberrations in the beam.