The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Apr. 11, 2003
James E. Jones, Butler, PA (US);
Randal L. Campbell, New Alexandria, PA (US);
David A. Diehl, Pittsburgh, PA (US);
Ljiljana Maksimovic, Allison Park, PA (US);
Ronald R. Ambrose, Pittsburgh, PA (US);
Gerald W. Gruber, Mars, PA (US);
James E. Jones, Butler, PA (US);
Randal L. Campbell, New Alexandria, PA (US);
David A. Diehl, Pittsburgh, PA (US);
Ljiljana Maksimovic, Allison Park, PA (US);
Ronald R. Ambrose, Pittsburgh, PA (US);
Gerald W. Gruber, Mars, PA (US);
PPG Industries Ohio, Inc., Cleveland, OH (US);
Abstract
Novel compositions comprising photoactive polymers comprising a dinitrobenzyl group in conjunction with a photoacid generator are disclosed. In one embodiment, the photoacid generator is a diazide and/or a sulfonyl aceto carbonyl compound. The photoacid generators are typically used in amounts of 10 weight percent or less. The compositions find particular application in storage stable, pH stable, and water stable positive photoresist compositions. Such compositions demonstrate reduced process time as compared with similar compositions lacking the photoacid generator. Methods for using these compositions are also disclosed.