The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2006
Filed:
Apr. 22, 2002
Lidia Vereen, Pleasanton, CA (US);
Peter N. Skarpelos, Berkeley, CA (US);
Brian J. Downum, Vancouver, WA (US);
Patrick Williams, Tracy, CA (US);
Terry Kin-ting Ko, South San Francisco, CA (US);
Christopher Heung-gyun Lee, Alameda, CA (US);
Kenneth Reese Reynolds, Los Gatos, CA (US);
John Hearne, Los Altos, CA (US);
Daniel Hachnochi, Palo Alto, CA (US);
Lidia Vereen, Pleasanton, CA (US);
Peter N. Skarpelos, Berkeley, CA (US);
Brian J. Downum, Vancouver, WA (US);
Patrick Williams, Tracy, CA (US);
Terry Kin-Ting Ko, South San Francisco, CA (US);
Christopher Heung-Gyun Lee, Alameda, CA (US);
Kenneth Reese Reynolds, Los Gatos, CA (US);
John Hearne, Los Altos, CA (US);
Daniel Hachnochi, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.