The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Dec. 03, 2004
Dirk Schaffer, Jena, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Thomas Schletterer, Ossmannstedt, DE;
Dirk Schaffer, Jena, DE;
Andreas Wurmbrand, Aalen-Reichenbach, DE;
Thomas Schletterer, Ossmannstedt, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
In a low-deformation support device of an optical element (), in particular an end plate () of a projection objective () of a projection exposure machine () for microlithography for the purpose of producing semiconductor components, in a mount (), the optical element () is connected to the mount () at least partly via a bonded connection. The bonded connection is located between the adjacent circumferential wails of mount () and optical element (). The mount () is provided with at least three bearing elements () which are distributed over the circumference and by means of which the optical element () is laterally and axially supported. The mount () has spring elements () which are constructed monolithically with the bearing elements () and are soft in axial and radial directions.