The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Oct. 20, 2003
Applicant:
Syed Shoaib Hasan Zaidi, Poughkeepsie, NY (US);
Inventor:
Syed Shoaib Hasan Zaidi, Poughkeepsie, NY (US);
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.
Quick Actions:
Zaidi, Syed Shoaib Hasan. (2006). Optical measurement of device features using lenslet array illumination (U.S. Patent No. 7084966). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7084966
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