The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Mar. 02, 2004
Akihiro Nakauchi, Tochigi, JP;
Akihiro Nakauchi, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This specification discloses a measuring apparatus for measuring the wavefront aberration of an optical system for a soft X-ray which can highly accurately measure the wavefront aberration of the optical system without using the soft X-ray. This measuring apparatus has a light source for supplying light of a predetermined wavelength, and a detector disposed at a location whereat an interference fringe is formed by the light of the predetermined wavelength passed through the optical system, and measures the wavefront aberration of the optical system on the basis of the result of the detection by this detector. The predetermined wavelength is a wavelength within a wavelength range of 150 nm to 300 nm.