The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Nov. 03, 2004
Sachio Uto, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunzi Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Sachio Uto, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunzi Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus for inspecting defects including a table which mounts a specimen to be inspected and which is movable in a plane, an ultraviolet light source for emitting ultraviolet light, an illuminating unit for illuminating the specimen mounted on the table with light emitted from the ultraviolet light source, a detecting unit for forming an image of the specimen illuminated by the illuminating unit and for detecting the image with an image sensor, and an image processing unit for processing the image detected by the image sensor and for outputting information about defects detected on the specimen. The illuminating unit and detecting unit are disposed in a clean environment which is supplied therein with clean gas and which is separated from outside by a wall.