The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2006
Filed:
Dec. 02, 2004
Applicants:
Hung Chih Chen, Santa Clara, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Tsz-sin Siu, Lai Chi Kok, HK;
Inventors:
Hung Chih Chen, Santa Clara, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Tsz-Sin Siu, Lai Chi Kok, HK;
Assignee:
Applied Materials, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Techniques for removing a substrate from a polishing pad are described. A substrate is pulled away from the polishing pad such that the edges of the substrate are pulled away from the polishing pad before the center of the substrate is pulled from the polishing pad.