The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Jun. 03, 2003
Lena Nicolaides, Castro Valley, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Alex Salnik, Castro Valley, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Alex Salnik, Castro Valley, CA (US);
Therma-Wave, Inc., Fremont, CA (US);
Abstract
A modulated reflectance measurement system includes two diode-based lasers for generating a probe beam and an intensity modulated pump beam. The pump and probe beams are joined into a collinear beam using a laser diode power combiner. One or more optical fibers are used to transport the beams either before and/or after they are combined. The collinear beam is focused through one or more lenses or other optical components for collimation. The collinear beam is then focused by an objective lens onto a sample. Reflected energy returns through an objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A processor uses the Q and/or I signals to analyze the sample.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile