The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Sep. 14, 2004
Applicants:
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Delft, NL;
Inventors:
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Delft, NL;
Assignee:
ASML Netherlands B.V, Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
Use of a refraction grating to divide a beam of radiation into a plurality of sub-beams that are each directed onto an array of individually controllable elements, modulated thereby and projected onto a substrate as an array of spots.