The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Apr. 30, 2004
Katsuyoshi Matsuura, Kawasaki, JP;
Wensheng Wang, Kawasaki, JP;
Ko Nakamura, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
An IrOfilm is formed as a first conductive oxide film on a PLZT film by a reactive sputtering method. Thereafter, thermal treatment by, for example, RTA is performed in an atmosphere containing oxygen having partial pressure of less than 5% of atmospheric pressure. As a result, crystallization of the PLZT film is promoted, and annealing treatment is performed for the IrOfilm. Thereafter, furnace annealing at 600° C. or higher, for example, 650° C. is performed for 60 minutes in, for example, an Oatmosphere as recovering annealing to recover oxygen deficiency in the PLZT film. Subsequently, an IrOfilm is formed as a second conductive oxide film on the IrOfilm by a sputtering method.