The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
Jan. 30, 2003
Hiroaki Sugimoto, Kyoto, JP;
Takeshi Yoshida, Kyoto, JP;
Hiroshi Kato, Kyoto, JP;
Takuya Kuroda, Kyoto, JP;
Tadashi Sasaki, Kyoto, JP;
Hiroaki Sugimoto, Kyoto, JP;
Takeshi Yoshida, Kyoto, JP;
Hiroshi Kato, Kyoto, JP;
Takuya Kuroda, Kyoto, JP;
Tadashi Sasaki, Kyoto, JP;
Abstract
In a substrate treating unit, a removal liquid supplying mechanism supplies a removal liquid to the surface of a substrate. In order to retain the removal liquid on the surface of the substrate for a fixed time, a spin chuck is operated to spin the substrate at such a low speed as to retain the removal liquid on the substrate, or spins the substrate intermittently, or temporarily stops spinning of the substrate. Thus, treatment with the removal liquid progresses without a further supply of the removal liquid, thereby restraining consumption of the removal liquid.