The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Mar. 04, 2003
Hiromi Yajima, Kanagawa, JP;
Tatsumi Suganuma, Kanagawa, JP;
Noriaki Yoshikawa, Kanagawa, JP;
Tadashi Yotsumoto, Oita, JP;
Kenji Nakata, Tokyo, JP;
Hiromi Yajima, Kanagawa, JP;
Tatsumi Suganuma, Kanagawa, JP;
Noriaki Yoshikawa, Kanagawa, JP;
Tadashi Yotsumoto, Oita, JP;
Kenji Nakata, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.