The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Sep. 23, 2004
Sheng Wu, Hsinchu, TW;
Da Sung, Hsinchu, TW;
Powerchip Semiconductor Corp., Hsinchu, TW;
Abstract
A method of manufacturing a non-volatile memory cell includes forming a first dielectric layer on a substrate. A second dielectric layer having a trench is formed on the first dielectric layer. Thereafter, a pair of charge storage spacers is formed on sidewalls of the trench. A third dielectric layer is then formed over the substrate to cover the first dielectric layer, the charge storage spacers and second dielectric layer. A conductive structure is formed on the third dielectric layer over the charge storage spacers. Subsequently, portions of the third dielectric layer, the second dielectric layer and first dielectric layer not covered by the conductive structure are removed. Ultimately, source/drain regions are formed in the substrate at each side of the conductive structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile