The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Sep. 30, 2003
Applicants:
Chi-shen Lee, Hsinchu, TW;
Cheng-chung Chen, Hsinchu, TW;
Chi-lin Chen, Hsinchu, TW;
Chai-yuan Sheu, Hsinchu, TW;
Inventors:
Chi-Shen Lee, Hsinchu, TW;
Cheng-Chung Chen, Hsinchu, TW;
Chi-Lin Chen, Hsinchu, TW;
Chai-Yuan Sheu, Hsinchu, TW;
Assignee:
Industrial Technology Research Institute, Chutung Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a thin film transistor (TFT) array involves ion replacement by oxidation-reduction processes for implementing the metal wiring layout of TFT-LCDs. This can overcome metal etching difficulties and achieve automatic alignment. The method of the invention replaces traditional lithographic etching techniciues.