The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Mar. 28, 2002
Applicants:
Yuki Shiota, Tokyo, JP;
Osamu Nozawa, Tokyo, JP;
Hideaki Mitsui, Tokyo, JP;
Inventors:
Assignee:
Hoya Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A halftone phase-shift mask blank, in which the phase shifter film is composed of two layers, a low-transmission layer having a principal function of transmittance control, and a high-transmission layer having a principal function of phase shift control, the extinction coefficient Kof the low-transmission layer and the extinction coefficient Kof the high-transmission layer satisfy K<K≦3.0 at an exposure wavelength λ falling between 140 nm and 200 nm, and the thickness dof the low-transmission layer satisfies 0.001≦Kd/λ≦0.500 at the exposure wavelength λ.