The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Oct. 04, 2001
Michael C. Zabka, Barron, WI (US);
Matthew Nicolas, Belle Plain, MN (US);
David Molitor, Plymouth, MN (US);
Michael C. Zabka, Barron, WI (US);
Matthew Nicolas, Belle Plain, MN (US);
David Molitor, Plymouth, MN (US);
Entegris, Inc., Chaska, MN (US);
Abstract
The invention relates to transport and shipping containers for wafers that are processed into semiconductor units. The wafer transport system provides wafer carriers that provide damage protection and particulate protection with minimal contamination of the wafers in the shipper. The invention includes a wafer cushion for cushioning semiconductor wafers that is made of a closed-cell polyethylene material with a surface resistivity of less than 5×10ohms per square that has less than 1800 ng/g Cl, 400 ng/g F/Acetate, 270 ng/g NO, 350 ng/g SO, and 60 ng/g POions leachable under moderate conditions. The wafer cushion optimally has no detectable outgassing organics under stringent conditions. The static control properties are the result of carbon that is part of the structure of the material.