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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7057175 B1

PDFFull Text
Expired
Date of Patent:
Jun. 06, 2006

Filed:

Jan. 14, 2004

Infrared absorption measurement method, infrared absorption measurement device, and method of manufacturing semiconductor device

Applicant:

Isamu Namose, Suwa, JP;

Inventor:

Isamu Namose, Suwa, JP;

Assignee:

Seiko Epson Corporation, Tokyo, JP;

Attorney:

Oliff & Berridge, PLC

Primary Examiner:

David Porta

Assistant Examiner:

Frederick F Rosenberger

Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01N 9/00 (2006.01); G01N 19/10 (2006.01); G01N 21/00 (2006.01); G01N 25/00 (2006.01); G01N 27/00 (2006.01); G01N 29/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

An infrared absorption measurement method includes: (a) measuring infrared absorption of a measurement target component in a state in which a sample gas including the measurement target component is decompressed; (b) calculating an absorption area in a peak region of the measurement target component in the infrared absorption shown in a graph which shows the relationship between the wave number and absorbance of the sample gas; and (c) calculating a concentration of the measurement target component in the sample gas based on the absorption area and pressure of the sample gas during decompression.

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Namose, Isamu. (2006). Infrared absorption measurement method, infrared absorption measurement device, and method of manufacturing semiconductor device (U.S. Patent No. 7057175). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7057175

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